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Inter-University Semiconductor Research Center, Seoul National University | 論文

• Metal FEAs Fabricated with Local Oxidation of Polysilicon for Large-Area Display Applications
• Metal FEAs Fabricated with Local Oxidation of Polysilicon for Large-Area Display Applications
• Ultra Shallow p+n Junction Formation Using the Solid Phase Diffusion(SPD) through'a-Si/Thin Barrier Oxide' Layer

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