Ultra Shallow p+n Junction Formation Using the Solid Phase Diffusion(SPD) through'a-Si/Thin Barrier Oxide' Layer

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概要

• 論文の詳細を見る
• 1995-08-21

著者

• LEE Jong

  Inter-University Semiconductor Research Center, Seoul National University

• PARK Byung

  Inter-University Semiconductor Research Center, School of Electrical Engineering, Seoul Nat'l Univ.

• Park Byung

  Inter-univ. Semicon. Res. Center Seoul Nat. Univ.

• Kwon Sang

  Dept. of Electronics Eng., Kyungwon Univ.

• Kwon Sang

  Dept. Of Electronics Eng. Kyungwon Univ.

• Lee Jong

  Inter-univ. Semicon. Res. Center Seoul Nat. Univ.

• Kwon Sang

  Dept. Of Electronics Engineering Kyungwon Univ.

• Kwon Sang

  Dept. of Electronics Eng. , Kyungwon Univ.

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