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Department of Quantum Engineering, School of Engineering, Nagoya University | 論文
- Diamond Film Formation by OH Radical Injection from Remote Microwave H_2/H_2O Plasma into Parallel-Plate RF Methanol Plasma
- High-Rate Anisotropic Ablation and Deposition of Polytetrafluoroethylene Using Synchrotron Radiation Process
- Synthesis of Diamond Using RF Magnetron Methanol Plasma Chemical Vapor Deposition Assisted by Hydrogen Radical Injection
- Effect of Rare Gas Dilution on CH_3 Radical Density in RF-Discharge CH_4 Plasma
- Measurement of Carbon Atom Density in High Density Plasma Process
- CH_3 Radical Density in Electron Cyclotron Resonance CH_3OH and CH_3OH/H_2 Plasmas
- Evaluation of CF_2 Radical as a Precursor for Fluorocarbon Film Formation in Highly Selective SiO_2 Etching Process Using Radical Injection Technique
- Development and Characterization of a New Compact Microwave Radical Beam Source
- Plasma cell leukemia producing monoclonal immunoglobulin E
- Synthesis of Fluorinated SiN_x Gate Dielectric Films Using ECR-PECVD Employing SiF_4/N_2/H_2 Gases
- Development and Characterization of a New Compact Microwave Radical Beam Source