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Department of Electronics and Communication, School of Science and Engineering, Waseda University | 論文
- Refractive Index Measurement of Silicon Thin Films Using Stab Optical Waveguides
- Optical Energy Gap Measurement of Semiconductor Ultrathin Films Using Optical Waveguides
- Oxidation Properties of Silicon Nitride Thin Films Fabricated by Double Tubed Coaxial Line Type Microwave Plasma Chemical Vapor Deposition : Surfaces, Interfaces and Films
- Method of Probe Measurement in N_2/SiH_4 Microwave Plasma