スポンサーリンク
Department of Electromagnetic Energy Engineering, Faculty of Engineering, Osaka University | 論文
- Sputtering Behavior of Boron Using Electron Cyclotron Resonance Plasma
- Electron Cyclotron Resonance Discharge of Sublimation Gas of Decaborane and Its Application to Preparation of Boron Thin Films ( Plasma Processing)
- Electron Cyclotron Resonance Discharge of Gas Sublimated from Decaborane by CO_2 Laser Irradiation