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Department of Elecrrical Engineering, National Sun Yat-sen University | 論文
- The Protrusion of Liquid Phase Oxide Deposition on Patterned Silicon Wafer with Silicon Nitride as Mask
- Conformal Step Coverage and Trench Filling of Liquid Phase Oxide Deposition
- The Improvement of Liquid Phase Deposition of Silicon Dioxide with Hydrochlorie Acid Incorporation