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Dep. Of Nanomechanics Tohoku Univ. | 論文
- A high-resolution endoscope of small diameter using electromagnetically vibration of single fiber (特集 医療用MEMSデバイス)
- Debris-Free Laser-Assisted Low-Stress Dicing for Multi-Layered MEMS : Separation Method of Glass Layer
- Piezoelectric Resonator for Intravascular Ultrasonic Elastography
- Vertical Diaphragm Electrostatic Actuator for a High Density Ink Jet Printer Head
- Debris-free Low-stress High-speed Laser-assisted Dicing for Multi-layered MEMS
- Debris-Free High-Speed Laser-Assisted Low-Stress Dicing for Multi-Layered MEMS