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Dainippon Screen Manufacturing Co., Ltd. | 論文
- Noncontact Measurement of Sodium Ions in Silicon Oxide
- A Novel Non-Destructive Characterization Method of Electronic Properties of Pre- and Post-Processing Silicon Surfaces Based on Ultrahigh-Vacuum Contactless Capacitance-Voltage Measurements
- Non-Destructive Characterization of Electronic Properties of Pre- and Post-Processing Silicon Surfaces by UHV Contactless Capacitance-Voltage Method
- Investigation of Surface Contamination on Silicon Oxide after Hydrofluoric Acid Etching by Noncontact Capacitance Method
- Evaluation of Surface Contamination by Noncontact Capacitance Method under UV Irradiation