スポンサーリンク
College of Science and Engineering, Ritsumeikan University, 1-1-1 Noji-Higashi, Kusatsu, Shiga 525-8577, Japan | 論文
- Nanoimprint Lithography Using Novolak-Type Photoresist and Soft Mold at Room Temperature
- Characterization of Four-Points-Pinned Ring-Shaped Silicon Microelectromechanical Systems Resonator
- Silicon Beam Microelectromechanical Systems Resonator with a Sliding Electrode
- Two-Stage-Driven Cantilever-Based RF Micro-Electro-Mechanical System Microswitch
- Laterally-Driven Silicon RF Micro-Switch with High Isolation