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Central Research Laboratory Hitachi Ltd.:(present Address)department Of Electronics Tohoku Institute | 論文

• Confirmation of Aluminum-Induced Negative Charge in Thermally Oxidized Silicon Wafers Using AC Surface Photovoltage Method
• Characterization of Damaged Layer Using AC Surface Photovoltage in Silicon Wafers
• Nondestructive Diagnostic Method Using AC Surface Photovoltage in Silicon Wafers Rinsed with Metal-Contaminated Water Solutions

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