LEE Seung | Department of Materials science and Engineering, Hanyang University
スポンサーリンク
概要
- LEE Seung Minの詳細を見る
- 同名の論文著者
- Department of Materials science and Engineering, Hanyang Universityの論文著者
Department of Materials science and Engineering, Hanyang University | 論文
- Electrical Properties of Atomic Layer Deposited HfO_2 Gate Dielectric Film Using D_2O as Oxidant for Improved Reliability
- Electrical Properties of Atomic Layer Deposited HfO2 Gate Dielectric Film Using D2O as Oxidant for Improved Reliability
- Highly Anisotropic Etching of Tungsten-Nitride for an X-Ray Mask Absorber with an Inductively Coupled Plasma System
- Structural Characterization of a Mo/Ru/Si Extreme Ultraviolet (EUV) Reflector by Optical Modeling
- Analysis of Multilayer Structure for Reflection of Extreme-Ultraviolet Wavelength