Takeyama Mayumi | Department of Electrical and Electronic Engineering, Faculty of Engineering, Kitami Institute of Technology, Kitami, Hokkaido 090-8507, Japan.

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概要

• Takeyama Mayumiの詳細を見る
• 同名の論文著者
• Department of Electrical and Electronic Engineering, Faculty of Engineering, Kitami Institute of Technology, Kitami, Hokkaido 090-8507, Japan.の論文著者

関連著者

• Takeyama Mayumi

  Department Of Electrical And Electronic Engineering Faculty Of Engineering Kitami Institute Of Techn

• Takeyama Mayumi

  Department of Electrical and Electronic Engineering, Faculty of Engineering, Kitami Institute of Technology, Kitami, Hokkaido 090-8507, Japan.

著作論文

• Characterization of silicon nitride thin films deposited by reactive sputtering and plasma-enhanced CVD at low temperatures

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