Suzuki Kazunari | Development and Engineering Department, Industrial Cleaning Equipment Division, Kaijo Corporation, Hamura, Tokyo 205-8607, Japan

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概要

関連著者

Okano Shoichi
Development and Engineering Department, Industrial Cleaning Equipment Division, Kaijo Corporation, 3-1-5 Sakae-cho, Hamura, Tokyo 205-8607, Japan
Han Ki
Development and Engineering Department, Industrial Cleaning Equipment Division, Kaijo Corporation, 3-1-5 Sakae-cho, Hamura, Tokyo 205-8607, Japan
Koike Yoshikazu
Faculty of Engineering, Shibaura Institute of Technology, 3-7-5 Toyosu, Koto, Tokyo 135-8548, Japan
Suzuki Kazunari
Development and Engineering Department, Industrial Cleaning Equipment Division, Kaijo Corporation, Hamura, Tokyo 205-8607, Japan
Imazeki Yasuhiro
Development and Engineering Department, Industrial Cleaning Equipment Division, Kaijo Corporation, Hamura, Tokyo 205-8607, Japan
Soejima Junichiro
Development and Engineering Department, Industrial Cleaning Equipment Division, Kaijo Corporation, Hamura, Tokyo 205-8607, Japan

著作論文

Application of novel ultrasonic cleaning equipment that uses the waveguide mode for the single-wafer cleaning process (Special issue: Advanced metallization for ULSI applications)

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