Kawano Yuichi | Renesas Electronics Corporation, Hitachinaka, Ibaraki 312-8504, Japan

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概要

関連著者

OKADA Masakazu
Renesas Technology Corporation
Asai Koyu
Renesas Electronics Corporation, 751 Horiguchi, Hitachinaka, Ibaraki 312-8504, Japan
Fujisawa Masahiko
Renesas Electronics Corporation, Hitachinaka, Ibaraki 312-8504, Japan
Hirose Yukinori
Renesas Electronics Corporation, 751 Horiguchi, Hitachinaka, Ibaraki 312-8504, Japan
Kido Shigenori
Renesas Technology Corp., 4-1 Mizuhara, Itami, Hyogo 664-0005, Japan
Nakanishi Nobuto
Renesas Technology Corp., 4-1 Mizuhara, Itami, Hyogo 664-0005, Japan
Furuhashi Takahisa
Renesas Electronics Corporation, Hitachinaka, Ibaraki 312-8504, Japan
Matsumoto Masahiro
Renesas Electronics Corporation, Hitachinaka, Ibaraki 312-8504, Japan
Kawano Yuichi
Renesas Electronics Corporation, Hitachinaka, Ibaraki 312-8504, Japan

著作論文

Analysis of sidewall damage layer in low-k film using the interline dielectric capacitance measurements (Special issue: Advanced metallization for ULSI applications)

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