Hombo Kyoko | Materials Research Laboratory, Hitachi Ltd., Hitachi, Ibaraki 319-1292, Japan

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概要

関連著者

Amanokura Jin
Semiconductor Materials Division, Hitachi Chemical Co., Ltd., Hitachi, Ibaraki 317-8555, Japan
Ono Hiroshi
Semiconductor Materials Division, Hitachi Chemical Co., Ltd., Hitachi, Ibaraki 317-8555, Japan
Hombo Kyoko
Materials Research Laboratory, Hitachi Ltd., Hitachi, Ibaraki 319-1292, Japan

著作論文

Development of High-Speed Copper Chemical Mechanical Polishing Slurry for Through Silicon Via Application Based on Friction Analysis Using Atomic Force Microscope

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