Uchiyama Shingo | NTT Telecommunications Energy Laboratories, 3-1 Morinosato Wakamiya, Atsugi-shi, Kanagawa 243-0198, Japan

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概要

関連著者

Tsuchizawa Tai
Ntt Telecommunications Energy Laboratories
ODA Masatoshi
NTT Telecommunications Energy Laboratories
IRIGUCHI Hiroki
NTT Advanced Technology Crporation
TAKAHASHI Chiharu
NTT Telecommunications Energy Laboratories
SHIMADA Masaru
NTT Telecommunications Energy Laboratories
UCHIYAMA Shingo
NTT Telecommunications Energy Laboratories
Takahashi Chiharu
NTT Telecommunications Energy Laboratories, 3-1 Morinosato Wakamiya, Atsugi-shi, Kanagawa 243-0198, Japan
Uchiyama Shingo
NTT Telecommunications Energy Laboratories, 3-1 Morinosato Wakamiya, Atsugi-shi, Kanagawa 243-0198, Japan
Oda Masatoshi
NTT Telecommunications Energy Laboratories, 3-1 Morinosato Wakamiya, Atsugi-shi, Kanagawa 243-0198, Japan
Iriguchi Hiroki
NTT Advanced Technology Corporation, 3-1 Morinosato Wakamiya, Atsugi-shi, Kanagawa 243-0198, Japan
Tsuchizawa Tai
NTT Telecommunications Energy Laboratories, 3-1 Morinosato Wakamiya, Atsugi-shi, Kanagawa 243-0198, Japan

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著作論文

Electron Cyclotron Resonance Plasma Etching of $\alpha$-Ta for X-Ray Mask Absorber Using Chlorine and Fluoride Gas Mixture

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