Isobe Akira | Kyushu University, Fukuoka 819-0395, Japan

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概要

• Isobe Akiraの詳細を見る
• 同名の論文著者
• Kyushu University, Fukuoka 819-0395, Japanの論文著者

関連著者

• Isobe Akira

  Kyushu University, Fukuoka 819-0395, Japan

• Komiyama Takashi

  Tokyo Seimitsu Co., Ltd., Hachioji, Tokyo 192-0032, Japan

• Kurokawa Syuhei

  Kyushu University, Fukuoka 819-0395, Japan

• Yokoyama Toshiyuki

  Tokyo Seimitsu Co., Ltd., Hachioji, Tokyo 192-0032, Japan

• Akaji Masatoshi

  Nitta Haas Inc., Kyotanabe, Kyoto 610-0333, Japan

• Kurokawa Shuhei

  Kyushu University, Fukuoka 819-0395, Japan

著作論文

• Mechanisms of Local Planarization Improvement Using Solo Pad in Chemical Mechanical Polishing
• New Model of Defect Formation Caused by Retainer Ring in Chemical Mechanical Polishing
• Proposal of New Polishing Mechanism Based on Feret's Diameter of Contact Area between Polishing Pad and Wafer

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