Deguchi Kimiyoshi | NTT Telecommunications Energy Laboratories, Atsugi, Kanagawa 243-0198, Japan

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概要

• Kumasaka Fumiakiの詳細を見る
• 同名の論文著者
• NTT Telecommunications Energy Laboratories, Atsugi, Kanagawa 243-0198, Japanの論文著者

関連著者

• MATSUDA Tadahito

  NTT Telecommunications Energy Laboratories

• ODA Masatoshi

  NTT Telecommunications Energy Laboratories

• IBA Yoshihisa

  Fujitsu Laboratories Ltd.

• TAGUCHI Takao

  ASET Super-fine SR Lithography Laboratory

• KUMASAKA Fumiaki

  Fujitsu Laboratories Ltd.

• SAMBONSUGI Yasuhiro

  Fujitsu Laboratories Ltd.

• DEGUCHI Kimiyoshi

  NTT Telecommunications Energy Laboratories

• FUKUDA Makoto

  NTT Telecommunications Energy Laboratories

• MORITA Hirofumi

  NTT Telecommunications Energy Laboratories

• Horiuchi Kei

  Fujitsu Laboratories

• Matsui Yasuji

  Aset Super-fine Sr Lithography Laboratory

• Iizuka Takashi

  Fujitsu Laboratories Ltd.

• Horiuchi Kei

  Fujitsu Laboratories Ltd., Astugi, Kanagawa 243-0197, Japan

• Aoyama Hajime

  ASET Super-fine SR Lithography Laboratory, Atsugi, Kanagawa 243-0198, Japan

• Iizuka Takashi

  Fujitsu Laboratories Ltd., Astugi, Kanagawa 243-0197, Japan

• Deguchi Kimiyoshi

  NTT Telecommunications Energy Laboratories, Atsugi, Kanagawa 243-0198, Japan

• Matsui Yasuji

  ASET Super-fine SR Lithography Laboratory, Atsugi, Kanagawa 243-0198, Japan

• Taguchi Takao

  ASET Super-fine SR Lithography Laboratory, Atsugi, Kanagawa 243-0198, Japan

• Oda Masatoshi

  NTT Telecommunications Energy Laboratories, Atsugi, Kanagawa 243-0198, Japan

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著作論文

• Sub-100-nm Device Fabrication using Proximity X-Ray Lithography at Five Levels

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