Engelen Jan | Katholieke Universiteit Leuven (K.U.Leuven), Department of Electrical Engineering, 3000 Leuven, Belgium

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概要

• Engelen Janの詳細を見る
• 同名の論文著者
• Katholieke Universiteit Leuven (K.U.Leuven), Department of Electrical Engineering, 3000 Leuven, Belgiumの論文著者

関連著者

• LEESON Michael

  Intel Corporation

• Yan Pei-yang

  Intel Corporation

• Biafore John

  KLA-Tencor---Finle Division, Austin, TX 78759, U.S.A.

• Pret Alessandro

  IMEC, Kapeldreef 75, B-3001 Leuven, Belgium

• Gronheid Roel

  IMEC, Kapeldreef 75, B-3001 Leuven, Belgium

• Engelen Jan

  Katholieke Universiteit Leuven (K.U.Leuven), Department of Electrical Engineering, 3000 Leuven, Belgium

• Younkin Todd

  IMEC, Kapeldreef 75, B-3001 Leuven, Belgium

• Garidis Konstantinos

  Kungliga Tekniska Högskolan (KTH), Stockholm 10044, Sweden

• Garidis Konstantinos

  Kungliga Tekniska Högskolan (KTH), Stockholm 10044, Sweden

• Yan Pei-Yang

  Intel Corporation, 3065 Bowers Ave, Santa Clara, CA 95054, U.S.A.

著作論文

• Mask Effects on Resist Variability in Extreme Ultraviolet Lithography
• Mask Effects on Resist Variability in Extreme Ultraviolet Lithography (Special Issue : Microprocesses and Nanotechnology)

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