Jeon Heeyoung | Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul 133-791, Korea
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概要
- Jeon Heeyoungの詳細を見る
- 同名の論文著者
- Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul 133-791, Koreaの論文著者
関連著者
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Jeon Hyeongtag
Division Of Materials Science & Engineering Hanyang University
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Park Taeyong
Division Of Materials Science And Engineering Hanyang University
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Jeon Heeyoung
Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul 133-791, Korea
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Lee Jaesang
Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul 133-791, Korea
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Park Jingyu
Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul 133-791, Korea
著作論文
- Reduction of RuO
- Reduction of RuO₂ Film to Metallic Ru Film Using Atomic Layer Deposition under Different Oxygen Partial Pressure (Special Issue : Advanced Metallization for ULSI Applications)