Satoh Akira | Nano-device Innovation Research Center, National Institute of Advanced Industrial Science and Technology, Tsukuba, Ibaraki 305-8552, Japan

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概要

関連著者

Satoh Shigeo
Fujitsu Laboratories Ltd.
Kanayama Toshihiko
Nano-device Innovation Research Center, National Institute of Advanced Industrial Science and Technology, Tsukuba, Ibaraki 305-8552, Japan
Tada Tetsuya
Nano-device Innovation Research Center, National Institute of Advanced Industrial Science and Technology, Tsukuba, Ibaraki 305-8552, Japan
Poborchii Vladimir
Nano-device Innovation Research Center, National Institute of Advanced Industrial Science and Technology, Tsukuba, Ibaraki 305-8552, Japan
Arimoto Hiroshi
Nano-device Innovation Research Center, National Institute of Advanced Industrial Science and Technology, Tsukuba, Ibaraki 305-8552, Japan
Satoh Akira
Nano-device Innovation Research Center, National Institute of Advanced Industrial Science and Technology, Tsukuba, Ibaraki 305-8552, Japan

著作論文

Mechanical Stress Evaluation of Si Metal--Oxide--Semiconductor Field-Effect Transistor Structure Using Polarized Ultraviolet Raman Spectroscopy Measurements and Calibrated Technology-Computer-Aided-Design Simulations

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