IRIE Taizo | Department of Electrical Engineering, Science University of Tokyo
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概要
Department of Electrical Engineering, Science University of Tokyo | 論文
- Structural Properties of GaN Film with AIN Buffer Layers with Varying Growth Temperatures by Plasma-Assisted Molecular Beam Epitaxy
- Gas-Temperature-Controlled (GTC) CVD of Aluminum and Aluminum-Silicon Alloy Film for VLSI Processing : Techniques, Instrumentations and Measurement
- Epitaxial Growth of Al on Si by Gas-Temperature-Controlled Chemical Vapor Deposition : Techniques, Instrumentations and Measurement
- Filling of Sub-μm Through-holes by Self-sputter Deposition
- Copper Self-Sputtering by Planar Magnetron