NIIMI Tatsuya | Department of Applied Physics, Tokai University
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概要
Department of Applied Physics, Tokai University | 論文
- Ashing Properties in a Surface-Wave Mode Plasma with a Quartz Window
- Surface Wave Plasma Production Employing High Permittivity Material for Microwave Window : Nuclear Science, Plasmas, and Electric Discharges
- Ashing Properties in a Surface-Wave Mode Plasma with a High-Permittivity Alumina Window : Semiconductors
- Mode Transition Enhancement by Permittivity of Window Materials in Low Frequency Plasmas
- Enhancement of Negative-Ion-Assisted Silicon Oxidation by Radio-Frequency Bias