Shell Melissa | Intel Corporation, Hillsboro, OR 97124, U.S.A.

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概要

• Shell Melissaの詳細を見る
• 同名の論文著者
• Intel Corporation, Hillsboro, OR 97124, U.S.A.の論文著者

関連著者

• Tagawa Seiichi

  The Institute Of Scientific And Industrial Research

• KOZAWA Takahiro

  The Institute of Scientific and Industrial Research (ISIR), Osaka University

• Shell Melissa

  Intel Corporation, Hillsboro, OR 97124, U.S.A.

著作論文

• Theoretical Study on the Dependence of Acid Distribution on Material Properties of Chemically Amplified Extreme Ultraviolet Resists
• Theoretical Study on Relationship between Acid Generation Efficiency and Acid Generator Concentration in Chemically Amplified Extreme Ultraviolet Resists

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