KANG Kitaek | Wafer Masters, Inc.
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概要
Wafer Masters, Inc. | 論文
- Thermal Behavior of Large-Diameter Silicon Wafers during High-Temperature Rapid Thermal Processing in Single Wafer Furnace
- Slip-Free Rapid Thermal Processing in Single Wafer Furnace
- Homoepitaxial Chemical Vapor Deposition of 6H-SiC at Low Temperatures on {011^^-4} Substrates
- Photoluminescence of Ti Doped 6H-SiC Grown by Vapor Phase Epitaxy
- Design of Single-Wafer Furnace and Its Rapid Thermal Processing Applications