Uesugi Tsutomu | Toyota Central R&D Labs. Inc., Nagakute, Aichi 480-1192, Japan
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概要
Toyota Central R&D Labs. Inc., Nagakute, Aichi 480-1192, Japan | 論文
- Interface Properties of Al2O3/n-GaN Structures with Inductively Coupled Plasma Etching of GaN Surfaces
- Reliability Evaluation of Al
- Reliability Evaluation of Al₂O₃ Deposited by Ozone-Based Atomic Layer Deposition on Dry-Etched n-Type GaN (Special Issue : Recent Advances in Nitride Semiconductors)