Hiroshi Hiroshima | Advanced Manufacturing Research Institute (AMRI), National Institute of Advanced Industrial Science and Technology (AIST), 1-2-1 Namiki, Tsukuba, Ibaraki 305-8564, Japan
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- Advanced Manufacturing Research Institute (AMRI), National Institute of Advanced Industrial Science and Technology (AIST), 1-2-1 Namiki, Tsukuba, Ibaraki 305-8564, Japanの論文著者
Advanced Manufacturing Research Institute (AMRI), National Institute of Advanced Industrial Science and Technology (AIST), 1-2-1 Namiki, Tsukuba, Ibaraki 305-8564, Japan | 論文
- Microstructuring of 45-μm-Deep Dual Damascene Openings in SU-8/Si by UV-Assisted Thermal Imprinting with Opaque Mold
- Size Dependence of Quick Cavity Filling Behavior in Ultraviolet Nanoimprint Lithography Using Pentafluoropropane Gas
- Flexible polyimide micropump fabricated using hot embossing (Special issue: Microprocesses and nanotechnology)
- Microstructuring of Dual Damascene Opening by Hot Embossing Combined with Etch-Back Process
- Control of Parameters Influencing the Thermal Imprint of Parylene/Silicon