Ami Shigeto | o NTT LSI Laboratories
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概要
o NTT LSI Laboratories | 論文
- Evaluation of Image Shortening for Rectangular Array Patterns in X-Ray Lithography
- Studies on Defect Inspectability and Printability Using Programmed-Defect X-Ray Mask
- Critical-Dimension Controllability of Chemically Amplified Resists for X-Ray Membrane Mask Fabrication
- Fine Pattern Etching of W-Ti Absorber for X-Ray Mask with Electron Cyclotron Resonance Discharge Plasmas
- Evaluation of Acid Diffusibility in a Chemical Amplification Resist Using Acidic Water-Soluble Film