Tanaka Hidema | Department of Electrical Engineering, Science University of TOKYO

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• Tanaka Hidemaの詳細を見る
• 同名の論文著者
• Department of Electrical Engineering, Science University of TOKYOの論文著者

Department of Electrical Engineering, Science University of TOKYO | 論文

• Structural Properties of GaN Film with AIN Buffer Layers with Varying Growth Temperatures by Plasma-Assisted Molecular Beam Epitaxy
• Gas-Temperature-Controlled (GTC) CVD of Aluminum and Aluminum-Silicon Alloy Film for VLSI Processing : Techniques, Instrumentations and Measurement
• Epitaxial Growth of Al on Si by Gas-Temperature-Controlled Chemical Vapor Deposition : Techniques, Instrumentations and Measurement
• Filling of Sub-μm Through-holes by Self-sputter Deposition
• Copper Self-Sputtering by Planar Magnetron

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