Tatsumi Toru | System Devices Research Laboratories, NEC Corporation, 1120 Shimokuzawa, Sagamihara, Kanagawa 229-1198, Japan

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概要

• Tatsumi Toruの詳細を見る
• 同名の論文著者
• System Devices Research Laboratories, NEC Corporation, 1120 Shimokuzawa, Sagamihara, Kanagawa 229-1198, Japanの論文著者

関連著者

• Tatsumi Toru

  System Devices And Fundamental Research Nec Corporation

• Endo Kazuhiko

  System Devices Research Laboratories, NEC Corporation, 1120 Shimokuzawa, Sagamihara, Kanagawa 229-1198, Japan

• Tatsumi Toru

  System Devices Research Laboratories, NEC Corporation, 1120 Shimokuzawa, Sagamihara, Kanagawa 229-1198, Japan

著作論文

• Metal Organic Atomic Layer Deposition of Metal Silicate Film for High-$k$ Gate Dielectrics

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