TAMURA Hifumi | Hitachi, Lid., Central Research Laboratory
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概要
Hitachi, Lid., Central Research Laboratory | 論文
- Estimation of Radiation Damage and Pattern Resolution in Ion Direct Writing Using Scattering of Low Energetic Ions
- Ar^+ -Si Sputtering in Low Temperature and High Vacuum Pressure Ranges
- High Speed Laser Beam Scanning Using an Acousto-Optical Deflector (AOD)