High Speed Laser Beam Scanning Using an Acousto-Optical Deflector (AOD)
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概要
- 論文の詳細を見る
The cylindrical lensing effect in high-speed laser-beam scanning using an acousto-optical deflector AOD was theoretically and experimentally investigated. As a result, both a static and a dynamic cylindrical lensing effect was found during high-speed laser-beam scans. A compensation for a cylindrical lensing effect was proven to be very important for a realization of high-speed laser-beam scanning. Examples of this compensation are an improvement in the voltage-frequency converter and the use of a cylindrical lens behind the AOD. With such compensation, the focal position deviation from the nominal focal plane could be suppressed to remain within 4 μm when the laser beam was scanned over about 300 μm on the focal plane at a 10 m/s scanning speed and a 20 kHz ramp signal frequency.
- 社団法人応用物理学会の論文
- 1987-07-20
著者
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HOSAKA Sumio
Hitachi, Lid., Central Research Laboratory
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Hosaka Sumio
Hitachi Ltd. Central Research Laboratory
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Hosaka Sumio
Hitachi Lid. Central Research Laboratory
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SEYA Eiichi
Hitachi, Ltd., Central Research Laboratory
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HARADA Tasuo
Hitachi, Ltd., Central Research Laboratory
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TAKANASHI Akihiro
Hitachi, Ltd., Central Research Laboratory
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Seya Eiichi
Hitachi Ltd. Central Research Laboratory
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Harada Tasuo
Hitachi Ltd. Central Research Laboratory
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Takanashi Akihiro
Hitachi Ltd.
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Takanashi Akihiro
Hitachi Ltd. Central Research Laboratory
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