FURUKAWA Yukio | Nanotechnology Research Laboratory, Waseda University
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概要
Nanotechnology Research Laboratory, Waseda University | 論文
- Au-electrode-embedded cyclo-olefin polymer microchip using low-temperature direct bonding (特集 マイクロ加工および支援技術)
- Au-Electrode-Embedded Cyclo-Olefin Polymer Microchip Using Low-Temperature Direct Bonding
- Low-temperature Direct Bonding of Poly(methyl methacrylate) for Polymer Microchips
- Simplified 20-μm Pitch Vertical Interconnection Process for 3D Chip Stacking
- Fabrication of Metallic Nanopatterns Using the Vacuum Type UV-NIL Equipment