ITO Sotaro | Department of Applied Physics and Chemistry, Faculty of Engineering, Hiroshima University
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- Department of Applied Physics and Chemistry, Faculty of Engineering, Hiroshima Universityの論文著者
Department of Applied Physics and Chemistry, Faculty of Engineering, Hiroshima University | 論文
- Direct Measurement of Sheath Electric Field Distribution in Front of Substrate in Electron Cyclotron Resonance Plasma by Laser-Induced Fluorescence Technique
- Two-Dimensional Measurement of He Metastable Atom Density Profile in Front of Substrate in Electron Cyclotron Resonance Plasma Flow by Laser-Induced Fluorescence Spectroscopy
- Spatial Distribution of He Metastable Atoms in Electron Cyclotron Resonance Plasma
- Spectroscopic Study of Rapid Mixing and Cooling of a High-Density He Plasma Flow Penetrating into Hydrogen Gas
- Population Inversion in Mixing Hydrogen Gas with a High Temperature Plasma