HUANG Chun | Department of Material Science and Engineering, National Tsing Hua University
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概要
Department of Material Science and Engineering, National Tsing Hua University | 論文
- Thermal Stability and Oxidation Resistance of W, TiW, W(N)and TiW(N)Thin Films Deposited on Si
- Dielectric and Electrical Characteristics of Titanium-Modified Ta_2O_5 Thin Films Deposited on Nitrided Polysilicon by Metalorganic Chemical Vapor Deposition
- Effects of N_2O Plasma Annealing on the Characteristics of Tantalum Oxide Thin Films Deposited on TaN/Ta Electrode