Hirai Tadaaki | Central Research Laboratry, Hitachi Ltd.
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概要
Central Research Laboratry, Hitachi Ltd. | 論文
- Observation of Ring-Distributed Microdefects in Czochralski-Grown Silicon Wafers with a Scanning Photon Microscope and Its Diagnostic Application to Device Processing
- Epitaxial Transformation of Ion-Implanted Polycrystalline Si Films on (100) Si Substrates by Rapid Thermal Annealing
- Excess Noise in Amorphous Selenium Avalanche Photodiodes
- Semi-Empirical Formulas for Microparameters δ25, δ28, ρ28 in Water Moderated Slightly Enriched Uranium and Uranium Oxide Lattices