Kimura Shinichiro | Central Research Laboratory, Hitachi, Ltd., Kokubunji, Tokyo 185-8601, Japan

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概要

関連著者

Sugii Nobuyuki
Central Research Laboratory Hitachi Ltd.
Tsuchiya Ryuta
Central Research Laboratory Hitachi Ltd.
Kimura Shinichiro
Central Research Laboratory Hitachi Ltd.
Oda Hidekazu
Renesas Electronics Corporation, Hitachinaka, Ibaraki 312-8504, Japan
Ishigaki Takashi
Central Research Laboratory, Hitachi, Ltd., 1-280 Higashi-koigakubo, Kokubunji, Tokyo 185-8601, Japan
Morita Yusuke
Central Research Laboratory, Hitachi, Ltd., 1-280 Higashi-koigakubo, Kokubunji, Tokyo 185-8601, Japan
Iwamatsu Toshiaki
Renesas Technology Corp., 4-1 Mizuhara, Itami, Hyogo 664-0005, Japan
Inoue Yasuo
Renesas Technology Corp., 4-1 Mizuhara, Itami, Hyogo 664-0005, Japan
Ishigaki Takashi
Central Research Laboratory, Hitachi, Ltd., Kokubunji, Tokyo 185-8601, Japan
Tsuchiya Ryuta
Central Research Laboratory, Hitachi, Ltd., Kokubunji, Tokyo 185-8601, Japan
Sugii Nobuyuki
Central Research Laboratory, Hitachi, Ltd., Kokubunji, Tokyo 185-8601, Japan
Kimura Shinichiro
Central Research Laboratory, Hitachi, Ltd., Kokubunji, Tokyo 185-8601, Japan
Iwamatsu Toshiaki
Renesas Electronics Corporation, Hitachinaka, Ibaraki 312-8504, Japan
Inoue Yasuo
Renesas Electronics Corporation, Hitachinaka, Ibaraki 312-8504, Japan

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著作論文

Investigation and Integration of Polycrystalline Silicon/TiN/SiON Gate Stack in Silicon on Thin Buried Oxide Complementary Metal Oxide Semiconductor Field Effect Transistors

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