Kazuyuki Kohama | Department of Materials Science and Engineering, Kyoto University, Kyoto 606-8501, Japan

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概要

• Kohama Kazuyukiの詳細を見る
• 同名の論文著者
• Department of Materials Science and Engineering, Kyoto University, Kyoto 606-8501, Japanの論文著者

関連著者

• Koyu Asai

  Renesas Technology Corp., Hitachinaka, Ibaraki 312-8504, Japan

• Hiroshi Miyatake

  Renesas Technology Corp., Hitachinaka, Ibaraki 312-8504, Japan

• Hiroshi Miyatake

  Renesas Technology Corp., 4-1 Mizuhara, Itami, Hyogo 664-0005, Japan

• Masao Mizuno

  Thin Film Section, Electronics Research Laboratory, KOBE STEEL, Ltd., Kobe 651-271, Japan

• Maekawa Kazuyoshi

  Renesas Technology Corp., 4-1 Mizuhara, Itami, Hyogo 664-0005, Japan

• Ohmori Kazuyuki

  Renesas Technology Corp., Hitachinaka, Ibaraki 312-8504, Japan

• Mori Kenichi

  Renesas Technology Corp., Hitachinaka, Ibaraki 312-8504, Japan

• Kazuyuki Kohama

  Department of Materials Science and Engineering, Kyoto University, Sakyo-ku, Kyoto 606-8501, Japan

• Kazuhiro Ito

  Department of Materials Science and Engineering, Kyoto University, Sakyo-ku, Kyoto 606-8501, Japan

• Takashi Ohnishi

  Surface Design & Corrosion Research Section, Materials Research Laboratory, KOBE STEEL, Ltd., Kobe 651-271, Japan

• Masanori Murakami

  The Ritsumeikan Trust, Nakagyo-ku, Kyoto 604-8520, Japan

• Kazuyoshi Maekawa

  Renesas Technology Corp., Hitachinaka, Ibaraki 312-8504, Japan

• Maekawa Kazuyoshi

  Renesas Electronics Corporation, 751 Horiguchi, Hitachinaka, Ibaraki 312-8504, Japan

• Kenichi Mori

  Renesas Technology Corp., Hitachinaka, Ibaraki 312-8504, Japan

• Takashi Ohnishi

  Surface Design & Corrosion Research Section, Materials Research Laboratory, KOBE STEEL, Ltd., Kobe 651-271, Japan

• Kazuyuki Kohama

  Department of Materials Science and Engineering, Kyoto University, Kyoto 606-8501, Japan

• Masanori Murakami

  The Ritsumeikan Trust, Kyoto 604-8520, Japan

• Kazuyuki Ohmori

  Renesas Technology Corp., Hitachinaka, Ibaraki 312-8504, Japan

• Kazuhiro Ito

  Department of Materials Science and Engineering, Kyoto University, Kyoto 606-8501, Japan

• Mori Kenichi

  Renesas Electronics Corporation, Hitachinaka, Ibaraki 312-8504, Japan

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著作論文

• Performance of Cu Dual-Damascene Interconnects Using a Thin Ti-Based Self-Formed Barrier Layer for 28 nm Node and Beyond

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