Masanori Murakami | The Ritsumeikan Trust, Nakagyo-ku, Kyoto 604-8520, Japan
スポンサーリンク
概要
関連著者
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Masanori Murakami
The Ritsumeikan Trust, Nakagyo-ku, Kyoto 604-8520, Japan
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Masanori Murakami
The Ritsumeikan Trust, Kyoto 604-8520, Japan
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Kazuhiro Ito
Department of Materials Science and Engineering, Kyoto University, Kyoto 606-8501, Japan
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Ito Kazuhiro
Department Of Cardiovascular And Thoracic Surgery Kyoto Prefectural University Of Medicine
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Kohama Kazuyuki
Department Of Materials Science And Engineering Kyoto University
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Sonobayashi Yutaka
Department Of Material Science And Engineering Kyoto University
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Koyu Asai
Renesas Technology Corp., Hitachinaka, Ibaraki 312-8504, Japan
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Hiroshi Miyatake
Renesas Technology Corp., Hitachinaka, Ibaraki 312-8504, Japan
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Hiroshi Miyatake
Renesas Technology Corp., 4-1 Mizuhara, Itami, Hyogo 664-0005, Japan
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Masao Mizuno
Thin Film Section, Electronics Research Laboratory, KOBE STEEL, Ltd., Kobe 651-271, Japan
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Maekawa Kazuyoshi
Renesas Technology Corp., 4-1 Mizuhara, Itami, Hyogo 664-0005, Japan
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Ohmori Kazuyuki
Renesas Technology Corp., Hitachinaka, Ibaraki 312-8504, Japan
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Mori Kenichi
Renesas Technology Corp., Hitachinaka, Ibaraki 312-8504, Japan
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Kazuyuki Kohama
Department of Materials Science and Engineering, Kyoto University, Sakyo-ku, Kyoto 606-8501, Japan
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Kazuhiro Ito
Department of Materials Science and Engineering, Kyoto University, Sakyo-ku, Kyoto 606-8501, Japan
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Takashi Ohnishi
Surface Design & Corrosion Research Section, Materials Research Laboratory, KOBE STEEL, Ltd., Kobe 651-271, Japan
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Kazuyoshi Maekawa
Renesas Technology Corp., Hitachinaka, Ibaraki 312-8504, Japan
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Kazuyoshi Maekawa
Process Technology Development Division, Renesas Technology Corporation, Itami, Hyogo 664-0005, Japan
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Maekawa Kazuyoshi
Renesas Electronics Corporation, 751 Horiguchi, Hitachinaka, Ibaraki 312-8504, Japan
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Tomohisa Tanaka
Department of Materials Science and Engineering, Kyoto University, Kyoto 606-8501, Japan
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Kenichi Mori
Process Technology Development Division, Renesas Technology Corporation, Itami, Hyogo 664-0005, Japan
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Yasuharu Shirai
Department of Materials Science and Engineering, Kyoto University, Kyoto 606-8501, Japan
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Kenichi Mori
Renesas Technology Corp., Hitachinaka, Ibaraki 312-8504, Japan
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Takashi Ohnishi
Surface Design & Corrosion Research Section, Materials Research Laboratory, KOBE STEEL, Ltd., Kobe 651-271, Japan
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Kazuyuki Kohama
Department of Materials Science and Engineering, Kyoto University, Kyoto 606-8501, Japan
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Kazuyuki Ohmori
Renesas Technology Corp., Hitachinaka, Ibaraki 312-8504, Japan
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Mori Kenichi
Renesas Electronics Corporation, Hitachinaka, Ibaraki 312-8504, Japan
著作論文
- Effects of Pore Sealing on Self-Formation of Ti-Rich Barrier Layers in Cu(Ti)/Porous-Low-$k$ Samples
- Performance of Cu Dual-Damascene Interconnects Using a Thin Ti-Based Self-Formed Barrier Layer for 28 nm Node and Beyond