NAKAMURA Moritaka | Basic Process Development Division, FUJITSU LTD.
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概要
Basic Process Development Division, FUJITSU LTD. | 論文
- Porous β-SiC Fabrication by Electrochemical Anodization
- Blueshifts in the Photoluminescence of Porous Si by Immersion in Deionized Water
- Comparison of Photoluminescence Lifetimes between As-Prepared and Dry-Oxidized Porous Si
- Chemical States of Bromine Atoms on SiO_2 Surface after HBr Reactive Ion Etching : Analysis of Thin Oxide
- Mechanism of High Selectivity and Impurity Effects in HBr RIE: In-Situ Surface Analysis