Sakurai Haruaki | Electronic Materials Business Sector, Hitachi Chemical Co., Ltd., Hitachi, Ibaraki 317-8555, Japan
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概要
- Sakurai Haruakiの詳細を見る
- 同名の論文著者
- Electronic Materials Business Sector, Hitachi Chemical Co., Ltd., Hitachi, Ibaraki 317-8555, Japanの論文著者
関連著者
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Ryuzaki Daisuke
Central Research Laboratory Hitachi Ltd.
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Sakurai Haruaki
Electronic Materials Business Sector, Hitachi Chemical Co., Ltd., Hitachi, Ibaraki 317-8555, Japan
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Torii Kazuyoshi
Central Research Laboratory Hitachi Lid.
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Ryuzaki Daisuke
Central Research Laboratory, Hitachi, Ltd., Kokubunji, Tokyo 185-8601, Japan
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Hoshi Yosuke
Tsukuba Research Laboratory, Hitachi Chemical Co., Ltd., Tsukuba, Ibaraki 300-4247, Japan
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Machii Yoichi
Tsukuba Research Laboratory, Hitachi Chemical Co., Ltd., Tsukuba, Ibaraki 300-4247, Japan
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Koyama Naoyuki
Tsukuba Research Laboratory, Hitachi Chemical Co., Ltd., Tsukuba, Ibaraki 300-4247, Japan
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Ashizawa Toranosuke
Electronic Materials Business Sector, Hitachi Chemical Co., Ltd., Hitachi, Ibaraki 317-8555, Japan
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Yoshikawa Takahiro
Electronic Materials Business Sector, Hitachi Chemical Co., Ltd., Hitachi, Ibaraki 317-8555, Japan
著作論文
- Chemical Mechanical Polishing with Nanocolloidal Ceria Slurry for Low-Damage Planarization of Dielectric Films
- Low-Shrinkage Spin-On Glass for Low Parasitic Capacitance Gap-Filling Process in Advanced Memory Devices