Lee Hag | School of Advanced Materials Science and Engineering and Center for Advanced Plasma Surface Technology, Sungkyunkwan University, Suwon, Kyunggi-do 440-746, Korea
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概要
- Lee Hag Jooの詳細を見る
- 同名の論文著者
- School of Advanced Materials Science and Engineering and Center for Advanced Plasma Surface Technology, Sungkyunkwan University, Suwon, Kyunggi-do 440-746, Koreaの論文著者
関連著者
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Kwon Bong
School of Advanced Materials Science and Engineering and Center for Advanced Plasma Surface Technology, Sungkyunkwan University, Suwon, Kyunggi-do 440-746, Korea
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Lee Hag
School of Advanced Materials Science and Engineering and Center for Advanced Plasma Surface Technology, Sungkyunkwan University, Suwon, Kyunggi-do 440-746, Korea
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Lee Nae-Eung
School of Advanced Materials Science and Engineering and Center for Advanced Plasma Surface Technology, Sungkyunkwan University, Suwon, Kyunggi-do 440-746, Korea
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Ahn Jinho
School Of Materials Science And Engineering Hanyang University
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Park Jung
School Of Electrical Engineering & Computer Science Seoul National University
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Lee Nae-eung
School Of Metallurgical And Materials Engineering Sungkyunkwan University
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Kim Jin
School Of Biotechnology & Bioengineering Kangwon National University
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Park Young
School Of Electrical And Computer Engineering Sungkyunkwan University
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Ahn Joung-ho
School of Advanced Materials Science and Engineering and Center for Advanced Plasma Surface Technology, Sungkyunkwan University, Suwon, Kyunggi-do 440-746, Korea
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Shon J.
Jusung Engineering Co., Ltd., 49 Neungpyeong-ri, Opo-eup, Gwangju, Gyeonggi-do 464-892, Korea
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Lee Hag
School of Advanced Materials Science and Engineering and Center for Advanced Plasma Surface Technology, Sungkyunkwan University, Suwon, Kyunggi-do 440-746, Republic of Korea
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Lee Nae-Eung
School of Advanced Materials Science and Engineering and Center for Advanced Plasma Surface Technology, Sungkyunkwan University, Suwon, Kyunggi-do 440-746, Republic of Korea
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Kim Jin
School of Advanced Materials Science and Engineering and Center for Advanced Plasma Surface Technology, Sungkyunkwan University, Suwon, Kyunggi-do 440-746, Korea
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Lee Jaegab
School of Advanced Materials Engineering, Kookmin University, Seoul 136-702, Republic of Korea
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Jung Ho
School of Advanced Materials Science and Engineering and Center for Advanced Plasma Surface Technology, Sungkyunkwan University, Suwon, Kyunggi-do 440-746, Republic of Korea
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Lee Chiyoung
School of Advanced Materials Engineering, Kookmin University, Seoul 136-702, Republic of Korea
著作論文
- Inductively Coupled Plasma Etching of Chemical-Vapor-Deposited Amorphous Carbon in N2/O2/Ar Chemistries
- Effect of O2 Gas during Inductively Coupled O2/Cl2 Plasma Etching of Mo and HfO2 for Gate Stack Patterning