Harada Kazunori | Kasado Works, Hitachi Ltd.
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概要
Kasado Works, Hitachi Ltd. | 論文
- Slant Slot Antenna-Type Electron Cyclotron Resonance Plasma Source
- Spatial Distribution Measurement of Microwave Electric Field Using Thermal Sensitive Paper in a Microwave Etching System
- Measurement of a Three-Dimensional Distribution of Microwave Electric Field in Electron Cyclotron Resonance Plasmas
- Measurement of a Three-Dimensional Distribution of Microwave Electric Field in Electron Cyclotron Resonance Plasmas
- Simulation of Hunting of Rail Vehicles : 1st Report : Dynamic Models with Clearances in Various Parts and Transient Phenomena