Park Jea-Gun | Nano-SOI Process Laboratory, Hanyang University, Seoul 133-791, Korea

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概要

• Park Jea-Gunの詳細を見る
• 同名の論文著者
• Nano-SOI Process Laboratory, Hanyang University, Seoul 133-791, Koreaの論文著者

関連著者

• Paik Ungyu

  Department Of Ceramic Engineering Hanyang University

• Kim Sang-kyun

  Department Of Ceramic Engineering Hanyang University

• Park Jea-gun

  Nano-soi Process Laboratory Department Of Electrical And Computer Engineering Hanyang University

• Paik Ungyu

  Department of Ceramic Engineering, Hanyang University, Seoul 133-791, Korea

• Park Jea-Gun

  Nano-SOI Process Laboratory, Hanyang University, Seoul 133-791, Korea

• Oh Seong-geun

  Department Of Chemical Engineering Hanyang University

• KIM Dae-Hyeong

  KCTech

• Kang Hyun-goo

  Nano-soi Process Laboratory Hanyang University

• Katoh Takeo

  Nano-soi Process Laboratory Hanyang University

• Park Yong-Kook

  Nano-SOI Process Laboratory, Hanyang University, Seoul 133-791, Korea

• Kim Sang-Kyun

  Department of Ceramic Engineering, Hanyang University, Seoul 133-791, Korea

• Kim Dae-Hyeong

  KCTech, 271-14, Kyeruk-Ri, Miyang-Myon, Anseong-Si, Kyongki-Do, Korea

• Katoh Takeo

  Nano-SOI Process Laboratory, Hanyang University, Seoul 133-791, Korea

• Kang Hyun-Goo

  Nano-SOI Process Laboratory, Hanyang University, Seoul 133-791, Korea

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著作論文

• Effects of the Physical Characteristics of Cerium Oxide on Plasma-Enhanced Tetraethylorthosiliate Removal Rate of Chemical Mechanical Polishing for Shallow Trench Isolation
• The Effect of Cerium Precursor Agglomeration on the Synthesis of Ceria Particles and Its Influence on Shallow Trench Isolation Chemical Mechanical Polishing Performance

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