Woo Jong-Chang | School of Electrical and Electronics Engineering, Chung-Ang University, 221, Heukseuk-dong, Dongjak-gu, Seoul 156-756, Korea
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概要
- Woo Jong-Changの詳細を見る
- 同名の論文著者
- School of Electrical and Electronics Engineering, Chung-Ang University, 221, Heukseuk-dong, Dongjak-gu, Seoul 156-756, Koreaの論文著者
関連著者
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KIM Chang-Il
School of Electrical & Electronic Engineering, Chung-Ang University
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Woo Jong-Chang
School of Electrical and Electronics Engineering, Chung-Ang University, 221, Heukseuk-dong, Dongjak-gu, Seoul 156-756, Korea
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Um Doo-Seung
School of Electrical and Electronics Engineering, Chung-Ang University, 221, Heukseuk-dong, Dongjak-gu, Seoul 156-756, Korea
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Kim Dong-Pyo
School of Electrical and Electronics Engineering, Chung-Ang University, 221, Heukseuk-dong, Dongjak-gu, Seoul 156-756, Korea
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Kim Gwan-Ha
School of Electrical and Electronics Engineering, Chung-Ang University, 221, Heukseuk-dong, Dongjak-gu, Seoul 156-756, Korea
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Park Jung-Soo
School of Electrical and Electronics Engineering, Chung-Ang University, Seoul 156-759, Korea
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Joo Young-Hee
School of Electrical and Electronics Engineering, Chung-Ang University, Seoul 156-756, Korea
著作論文
- Etch characterization of TiO2 thin films using metal-insulator-metal capacitor in adaptively coupled plasma (Special issue: Dry process)
- Etch properties of TiN thin film in metal-insulator-metal capacitor using inductively coupled plasma (Special issue: Dry process)
- Etch Characteristics of ZrO2 Thin Films in High Density Plasma