Sekine Makoto | Plasma Technology Laboratory, Association of Super-advanced Electronics Technologies(ASET)

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• 同名の論文著者
• Plasma Technology Laboratory, Association of Super-advanced Electronics Technologies(ASET)の論文著者

Plasma Technology Laboratory, Association of Super-advanced Electronics Technologies(ASET) | 論文

• Mechanism of Radical Control in Capacitive RF Plasma for ULSI Processing
• Monitoring of Electron Energy Distribution Change from Optical Emission for Nonmagnetic Ultrahigh-Frequency Plasma
• In-situ Time-Resolved Infrared Spectroscopic Study of Silicon-Oxide Surface during Selective Etching over Silicon in Fluorocarbon Plasma

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