Oh Youn-jin | Dept.of Chemical Engineering Sungkyunkwan University
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概要
関連著者
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Oh Youn-jin
Dept.of Chemical Engineering Sungkyunkwan University
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Chung Chan-hwa
Dept.of Chemical Engineering Sungkyunkwan University
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Park Gyung-soon
Dept.of Chemical Engineering Sungkyunkwan University
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Jung Tae
Hynix Semiconductor Inc.
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Ryu Jae-ok
Hynix Semiconductor Inc.
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Park Sung
Fine Semitech Co. Ltd.
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Kim Il-Wook
Hynix Semiconductor Inc.
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Chung Chan-Hwa
Fine Semitech Co., Ltd.
著作論文
- A NEW CHEMICAL MECHANICAL POLISHING METHOD USING THE FROZEN ETCHANT PAD
- A NEW CHEMICAL MECHANICAL POLISHING METHOD USING THE FROZEN ETCHANT PAD
- A New Chemical Mechanical Polishing Method Using the Frozen Etchant Pad (2001 Asia-Pacific Workshop on Fundamental and Application of Advanced Semiconductor Devices(AWAD 2001))