Kim Moonkeun | Department of Control and Instrumentation Engineering, Korea University, Chungnam 339-700, Korea
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概要
- 同名の論文著者
- Department of Control and Instrumentation Engineering, Korea University, Chungnam 339-700, Koreaの論文著者
関連著者
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Kwon Kwang-ho
Department Of Electronic Engineering Hanseo University
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Kim Moonkeun
Department of Control and Instrumentation Engineering, Korea University, Chungnam 339-700, Korea
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KWON Kwang-Ho
Department of Control and Instrumentation Engineering, Korea University
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HONG MunPyo
Department of Display and Semiconductor Physics, Korea University
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Park Hyung-ho
Department Of Ceramic Engineering Yonsei University
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Nam Ki
Department Of Animal Physiology Faculty Of Agriculture Tohoku University
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Min Nam
Department of Control and instrumentation Engineering, Korea University, Chungnam 339-700, Republic of Korea
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Nam Ki
Department of Control and Instrumentation Engineering, Korea University, Chungnam 339-700, Korea
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Min Nam
Department of Biomicrosystem Technology, Korea University, Seoul 136-701, Korea
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Efremov Alexander
Department of Electronic Devices and Materials Technology, State University of Chemistry and Technology, 153000 Ivanovo, Russia
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Alexander Efremov
Department of Electronic Devices and Materials Technology, State University of Chemistry and Technology, 7 F. Engels St., 153000 Ivanovo, Russia
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Eftremov Alexander
Department of Electronic Devices and Materials Technology, State University of Chemistry and Technology, 7 F. Engels St., 153000 Ivanovo, Russia
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Jaehwa Jeong
Department of Control and Instrumentation Engineering, Korea University, Chungnam 339-700, Korea
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Kwangsoo Kim
Department of Sogang Institute of Advanced Technology, Sogang University, Seoul 121-742, Korea
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Baek Kyu-Ha
Electronics and Telecommunications Research Institute, Daejeon 305-700, Korea
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Kwon Kwang-Ho
Department of Control and instrumentation Engineering, Korea University, Chungnam 339-700, Republic of Korea
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Kwang-Ho Kwon
Department of Control and Instrumentation Engineering, Korea University, Chungnam 339-700, Korea
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Hong Munpyo
Department of Applied Physics, Korea University, Seoul 136-713, Korea
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Hong MunPyo
Department of Display and Semiconductor Physics, Korea University, Chungnam 339-700, Republic of Korea
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Kim Moonkeun
Department of Control and instrumentation Engineering, Korea University, Chungnam 339-700, Republic of Korea
著作論文
- Etching Characteristics of In2O3 and SnO2 Thin Films in an Inductively Coupled HBr/Ar Plasma: Effects of Gas Mixing Ratio and Bias Power
- Effect of Gas Mixing Ratio on Etch Behavior of Y2O3 Thin Films in Cl2/Ar and BCl3/Ar Inductively Coupled Plasmas