Hsieh Kuang | Nano-technology R&D Div./Emerging Central Lab. Macronix International Co. Ltd, Hsinchu, Taiwan 300, Republic of China
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概要
- Hsieh Kuang Yeuの詳細を見る
- 同名の論文著者
- Nano-technology R&D Div./Emerging Central Lab. Macronix International Co. Ltd, Hsinchu, Taiwan 300, Republic of Chinaの論文著者
関連著者
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CHANG Kow
Department of Electronic Engineering and Institute of Electronics, National Chiao Tung University, N
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Lin Bo
Department Of Electronic Engineering National Chiao Tung University
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Lai Chiung
Department Of Electronics Engineering And Institute Of Electronics National Chiao-tung University
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Hsieh Kuang
Nano-technology R&D Div./Emerging Central Lab. Macronix International Co. Ltd, Hsinchu, Taiwan 300, Republic of China
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Yao June
Department Of Electronic Materials Far East College
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Chang Kow
Department of Electronics Engineering and Institute of Electronics, National Chiao-Tung University, Hsin-Chu, Taiwan, Republic of China
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Lai Chiung
Department of Electronics Engineering and Institute of Electronics, National Chiao-Tung University, Hsin-Chu, Taiwan, Republic of China
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Lai Yi
Department of Electronic Engineering, National Taiwan University of Science and Technology, Taipei, Taiwan, Republic of China
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Hsieh Kuang
Nano-technology R&D Division/Emerging Central Laboratory, Macronix International Co., Ltd., Hsinchu, Taiwan 300, Republic of China
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Lin Bo
Department of Electronic Engineering, Northern Taiwan Institute of Science and Technology, Taipei 112, Taiwan, Republic of China
著作論文
- Robust Ultrathin Oxynitride with High Nitrogen Diffusion Barrier near its Surface Formed by NH3 Nitridation of Chemical Oxide and Reoxidation with O2
- Reoxidation Behavior of High-Nitrogen Oxynitride Films after O2 and N2O Treatment