Tanimoto S | Electronics Research Laboratory Nissan Motor Co. Ltd.
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概要
Electronics Research Laboratory Nissan Motor Co. Ltd. | 論文
- Preparation of a-Si_N_x:H Film Using N_2 Microwave Afterglow Chemical Vapor Deposition Method
- Generation Mechanism of Tensile Stress in a-Si_N_x Films Prepared by Afterglow Plasma Chemical Vapor Deposition Technique
- Residual Stress of a-Si_N_x:H Films Prepared by Afterglow Plasma Chemical Vapor Deposition Technique
- High-Intensity Vacuum Ultraviolet Light Source in Windowless Photochemical Vapor Deposition Reactor and Its Application to a-Si:H Deposition
- Effects of Electrode Geometry on Breakdown Voltage of a Single-Gap Pseudospark Discharge